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Travel: 40 µm
Length: 3.66" (93 mm)
Resolution(a): 10 nm
Capacitance: 7.2 µF
Feedback: Strain Gauge
Accuracy: +1%/-0%
Repeatablity: 0.7 µm
Included Cables:
- SMC Female to SMC Female, 3 m
- 9-pin D-Sub Male to 7-pin LEMO Female, 3 m
Recommended Controllers: BPC301, MPZ601, KPZ101/KSG101
Compatible Stages: LNR50 Series or OEM Applications
(a) Dependent on control electronics.
