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Full Scale Flow Range: 500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm (N2 equivalent)
Maximum Operating Outlet Pressure: 200 torr
Maximum Allowable Outlet Pressure Differential: 50 torr (between Q1 and Q2)
Normal Operating Pressure Differential: <150 torr (<450 torr for 10000/10000) (N2)
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Input Flow Range: 5 to 100% of each channel Full Scale rating (N2 equivalent)
Ratio Control Range: 1:1 to 20:1 and 20:1 to 1:1
Ratio Accuracy: 2% of ratio set point
Typical Accuracy: 0.3% of ratio set point
Ratio Repeatability & Reproducibility: 0.02% of channel Full Scale
Zero Temperature Coefficient: 0.05% Full Scale/°C
Span Temperature Coefficient: 0.08% Reading/°C
Typical Settling Time: <2 seconds
Warm-up Time: 30 minutes
Operating Temperature: 10 to 40°C
Storage Temperature: -20 to 65°C
Storage Humidity: 0 to 95% relative humidity, non-condensing
Temperature Display: 0 to 100°C
Temperature Accuracy: ±2°C
Temperature Resolution: 0.1°C
Fitting Type: 4 VCR male (non-rotatable)
Display: 4 digits for value, 4 characters for unit
Weight: 5 lbs. (2.3 kg)
Connector: Digital I/O: 5-pin microconnector (DeviceNet), Analog: 9-pin D male, EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Power Requirements: Digital I/O: 11-25 VDC, Analog: +15 to 24 VDC±5%
Power Consumption: 9 Watts
Communication: Analog, DeviceNet
For specific range please check the attachment below!
