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Full Scale Flow Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type: Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
Analog I/O Connector: 9-pin or 15-pin Type "D"
Maximum Inlet Pressure: 500 psig
Normal Operating Pressure Differential: 10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
Typical Accuracy: ±1.0% of Full Scale
Repeatability: ±0.2% of Full Scale
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.05% of Full Scale/°C
Span Temperature Coefficient: <0.08% of Reading./°C
Pressure Coefficient: <0.02% of Reading/psi
Warm-up Time: 2 minutes
Operating Temperature: 0° to 50°C
Power Requirements: ±15 VDC (150 mA start-up, 50 mA steady-state)
Wetted Materials: 316L S.S.
Compliance: CE
For specific range please check the attachment below!
