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X1 axis (Drive unit)
Contour:
- Measuring range: 200 mm
- Resolution: 0.05 µm
- Scale type: Reflective-type linear encoder
- Straightness: 2 µm/200 mm
- Accuracy (20 °C): ±(0.8+4L/200) µm L: Measuring length (mm)
Surface roughness:
- Straightness: 0.5 µm/200 mm
Z1 axis (Detector)
Contour:
- Measuring range: 60 mm (±30 mm from the horizontal)
- Resolution: 0.02 µm
- Scale type: Arc
- Accuracy (20 °C): ±(0.8+|2H|/100) µm; H: Measuring height from horizontal position (mm)
Surface roughness:
- Measuring range: 800 µm, 80 µm, 8 µm
- Resolution: 0.01 µm, 0.001 µm, 0.0001 µm
Z2 axis (Column)
Drive range: Specification is selectable from 300 mm or 500 mm.
Resolution: 0.05 µm
