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Measuring range (X×Y×Z): 600 x 650 x 250 mm
Max. stage loading: 50 kg
Common to vision displacement sensor (X×Y×Z): 534 x 650 x 250
Main unit mass (Including the special sub-base): 1465 kg
Vision measuring accuracy:
+ EUX,MPE/EUY,MPE>/sub> = (1.5+3L/1000) µm
+ EUZ,MPE = (1.5+4L/1000) µm
+ EUXY,MPE = (2+4L/1000) µm
Resolution of scale: 0.1 µm
Illumination unit: Contour illumination: White LED Vertical surface illumination: Color LED PRL: Color LED
Observation unit: Programmable power turret 1X-2X-6X
Thermal compensation function: Manual
