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Range X-axis: 0-11.81in 0-300mm
Range Y-axis: 0-7.87in 0-200mm
Range Z-axis: 0-7.87in 0-200mm
Resolution: 0.1µm
Resolution Z scale using Tracking Autofocus (TAF): -
Camera: High-sensitivity CCD camera B&W
Accuracy: E1xy (1.5+3L/1000)µm
E1z (1.5+4L/1000)µm
E2xy (2+4L/1000) µm
E U,MPE (ISO10360-7:2011) - 3+5.5L/1000, 3+6.0L/1000**
PF2D,MPE (ISO10360-7:2011) - 2.3µm
Drive Speed: 300mm/s
Illumination: Surface-White LED
Contour- White LED
Programmable Ring Light- White LED
Maganification change system: Programmable power turret (1x2x6x)
Stage glass size: 15.7x10.7in 399x271mm
Max. workpiece height: 7.8in 200mm
Max.workpiece load: 44lbs 20kg
Dimension(including machine stand): 33.8x37.4x63.3in 859x951x1609mm
Mass(including machine): 794lbs 360kg
Optional accessories
Laser Auto Focus
Rotary Index
