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Helium flush allows for measurement of even very light elements starting at sodium
Polycapillary optics
High-power tubes with chrome anode
4-fold automatically exchangeable filter
High-resolution CCD color camera, crosshairs with calibrated scale, adjustable LED illumination and laser pointer (class 1) for exact sample placement
Silicon drift detector
Fast, programmable XY-stage with pop-out function and electrically driven Z-axis for automated measurements
Applications
Au/Pd/Ni/CuFe and Sn/Ni coatings in the micro- and nanometer range
Assembled and unassembled circuit boards
Testing of base metallization layers (under-bump metallization, UBM) in the nanometer range
Measurement of light elements, e.g. determination of the phosphorus content (in ENEIG/ENEPIG) under Au and Pd
Lead-free solder caps on copper pillars
Testing the elemental composition of C4 and smaller solder bumps, as well as small contact surfaces in the semiconductor industry
Brochure
