Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Flow range: 10, 20 SLM
Gases: Air
Valve type: NO: Normally open
Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃)
Output signal: 0～5VDC
Repeatability: ±0.2％ F.S
Response: Depends on MFC selected.
Operating differential pressure: Depends on MFC selected.
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃ (Accuracy guarantee between 15～35℃), ≦85％RH (No condensation permitted)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: 100-240VAC: ≦500mA
Communication: Analog: 0～5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Surface treatment: Machined finish
Standard fitting: 3/8in.SWL (equivalent)
Accessory: Power cord, User's manual, Written guarantee
