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Flow range: 50SLM
Gases: He
Valve type: NO: Normally open
Flow rate control range: 5～100％ F.S. (Excluding Mass Flow Meter)
Accuracy: ±2％ F.S [※±1％ F.S Compatible] (Accuracy guaranteed between 15-35℃)
Setting signal: 0.25～5VDC
Output signal: 0～5VDC
Repeatability: ±0.2％ F.S
Response: Depends on MFC selected.
Operating differential pressure: Depends on MFC selected.
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃ (Accuracy guaranteed (between 15～35℃), ≦85％RH (No condensation permitted)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: 100-240VAC: ≦500mA
Communication: Analog: 0～5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal
Surface treatment: Machined finish
Standard fitting: One-touch fitting
Accessory: Power cord, User's manual, Written guarantee
