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Flow range: 10,20,30,50,100,200,300,500SCCM; 1,2,3,5SLM
Gases: He
Valve type: NC: Normally Close
Flow rate control range: 2-100％ F.S
Accuracy: ±1％ F.S [※±1％ F.S Compatible]
Setting signal: Digital: RS485, Analog: 0-5V and 4.3-20mA can be switched
Output signal: Main unit display: 7 segment LED, Digital: RS485, Analog: 0-5V and 4-20mA can be switched
Repeatability: ±0.2％ F.S
Response: ≦2sec
Operating differential pressure: 50-300KPa
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: +24VDC： ≧500mA
Communication: RS485, Analog 0-5VDC and 4-20mA can be switched
Wetted surface material: SUS316, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Solenoid
Standard fitting: 1/4in.SWL
Accessory: User's manual, Written guarantee
