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Plasma & Reactive Gas Solutions | EMIN.CO.ID

Air environment meter
Plasma & Reactive Gas Solutions

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Giorgio BormacLonroyMKS

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Plasma & Reactive Gas Solutions

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Giorgio Bormac OZ-30 Ozone Generator (30gr/h; with timer)

Giorgio Bormac OZ-30 Ozone Generator (30gr/h; with timer)

Giorgio Bormac OZ-10 Ozone Generator (10gr/h; with timer)

Giorgio Bormac OZ-10 Ozone Generator (10gr/h; with timer)

MKS AX7710MKS-01 Paragon® Flow Intelligent Remote Plasma Source (8 slm; NF3)

MKS AX7710MKS-01 Paragon® Flow Intelligent Remote Plasma Source (8 slm; NF3)

MKS RPS-CH24P1-P24C Remote Plasma Source for High Flow Applications (24 kW)

MKS RPS-CH24P1-P24C Remote Plasma Source for High Flow Applications (24 kW)

MKS RPS-CM12P1-P12C Remote Plasma Source for ALD, CVD and PVD Chambers (12kW)

MKS RPS-CM12P1-P12C Remote Plasma Source for ALD, CVD and PVD Chambers (12kW)

MKS AX7696MKS-01 R*evolution® Remote Plasma Source (10 slm)

MKS AX7696MKS-01 R*evolution® Remote Plasma Source (10 slm)

MKS HMPX60Q-MKS High Power Microwave Plasma System (6kW; 2440-2470MHz; Quartz)

MKS HMPX60Q-MKS High Power Microwave Plasma System (6kW; 2440-2470MHz; Quartz)

MKS HMPX60S-MKS High Power Microwave Plasma System (6kW; 2440-2470MHz; Sapphire)

MKS HMPX60S-MKS High Power Microwave Plasma System (6kW; 2440-2470MHz; Sapphire)

MKS HMPSQ-MKS High Power Microwave Plasma Source (6 kW, Quartz)

MKS HMPSQ-MKS High Power Microwave Plasma Source (6 kW, Quartz)

MKS HMPSS-MKS High Power Microwave Plasma Source (6 kW, Sapphire)

MKS HMPSS-MKS High Power Microwave Plasma Source (6 kW, Sapphire)

MKS AX7610Q Chemical Downstream Plasma Source (3kW; Quartz)

MKS AX7610Q Chemical Downstream Plasma Source (3kW; Quartz)

MKS AX7610S Chemical Downstream Plasma Source (3 kW, Sapphire)

MKS AX7610S Chemical Downstream Plasma Source (3 kW, Sapphire)

MKS AX2600-AX2700 Microwave Plasma Subsystems (1.8 / 3kW; 2440-2470MHz)

MKS AX2600-AX2700 Microwave Plasma Subsystems (1.8 / 3kW; 2440-2470MHz)

MKS AX8575 SEMOZON® Multi-Channel Ozone Delivery System (350g/Nm3)

MKS AX8575 SEMOZON® Multi-Channel Ozone Delivery System (350g/Nm3)

MKS AX8580 SEMOZON® Fully Integrated Modular Ozone Delivery System (50 slm)

MKS AX8580 SEMOZON® Fully Integrated Modular Ozone Delivery System (50 slm)

MKS AX8585 SEMOZON® Stand-alone Ozone Delivery System for Advanced Processes (200 slm)

MKS AX8585 SEMOZON® Stand-alone Ozone Delivery System for Advanced Processes (200 slm)

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