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Measuring range:
- The Z axis (vertical): 320µm(-160µm~160µm), 12600µin(-6300µin~+6300µin)
- The X axis (Transverse): 17.5mm (0.69inch)
Resolution:
- The Z axis (vertical): 0.002µm/±20µm, 0.004µm/±40µm
0.008µm/±80µm, 0.02µm/±160µm
Standard: ISO4287, ANSI b46.1, DIN4768, JISb601
Filter: RC, PC-RC, Gauss, D-P
Cut off length (lr): 0.25, 0.8, 2.5mm
Accurate to: 0.001µm
Tolerance: ±(5nm+0.1A); A=Ra standard value of precise specimen
Repeatability: ≤3%
Residual profile: ≤0.010µm
Power supply: Built-in Lithium ion battery 3600mAh
Main unit dimension: 155×145×58mm
Drive unit dimension: 23×27×115mm
Zoom of height adapter: 40mm
Weight: Around 1000g
Working environment: Temperature:-20℃~40℃; Humidity: <90%RH
Store and Transportation: Temperature:-20℃~40℃; Humidity: <90%RH
