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Roughness measurement:
Measuring range of X axis: 0~200mm
Measuring range of Z1 axis: ±400µm
Resolution of Z1 axis: 0.001µm
Ra measuring range: 0.1µm~64µm
Indication error: ±(5nm+2.5%A)µm , A(Ra)µm
Measurement residual: ≤0.005um
Contour measurement:
Measuring range of X axis: 0~200mm
Straigtness of X axis: 1µm/200mm
Indication error of X axis: ±(0.6+0.015L)µm
Measuring range of Z1 axis: ±25mm
Resolution of Z1 axis: 0.001µm
Indication error of Z1 axis: ±(0.6+0.05H)µm
Measuring range of Z axis: 0~450mm
Weight: 220kg
Dimension: 800*450*1100mm
