Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Flow Accuracy: Standard Flow Accuracy or [(zero stability/flow rate) x 100]% of rate, whichever is greater
Standard Flow Accuracy: Liquid: 0.2%; Gas: 0.5% of rate
Zero Stability Stainless Steel Sensor (kg/hr): 0.00013/0.0010/0.0040
Repeatability & Reproducibility: +0.05% or +[0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
Response Time (Settling Time): 2% F.S. of final value,(per SEMI Guideline E17-91): <2 seconds
Temperature Coefficient Zero: 0.05% F.S./°C; Span: 0.035% F.S./°C
Control Range / Turndown: 100:1 or down to minimum flow
Ratings
Operating Temperature Range: 0 to 60ºC
Temperature Accuracy (Device): ±0.5ºC
Differential Pressure Range:
Liquid: 10 to 200 psi (0.69 to 13.8 bar)
Gas: 10 to 150 psi (0.69 to 10.3 bar)
Maximum Operating Pressure:
Standard: 500 psi (34.5 bar)
Optional: 1500 psi (103 bar)
Density Range: 0 to 2.0 g/cc
Density Accuracy: ±0.005 g/cc
Leak Integrity (External):
Elastomer: Outboard 1 x 10-9 atm. cc/sec., helium (max)
Metal Seal: 1 x 10-10 atm. cc/sec., helium (max)
For more details, see datasheet.