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Performance
Embedded Thermal Flow Sensor: Ability to Monitor Flow
Full Scale Range: 2600-10000 sccm N₂Eq
Pressure Reading
Accuracy: ±1% of reading
Zero Temperature Coefficient: ±0.02% of F.S./ºC
Span Temperature Coefficient: ±0.04% of reading/ºC
Pressure Control
Measurement Range: 2-100% F.S.
Accuracy: <10% F.S. ±0.2% F.S., 10-100% F.S. ±1% F.S.
Response Time: <1 sec typ. (excluding system time constant)
Ratings
Measurement Range: 2-100% of F.S.
Accuracy: >35% ±1% of reading 2-35% ±0.35% F.S.
Repeatability: ±0.2% of F.S.
Zero Temp. Coefficient: <0.05% of F.S./ºC
Span Temp. Coefficient: <0.08% of reading/ºC
Zero Stability: <0.5% per year
Valve Leak-by: <1% of F.S.
Ratings
Operating Temperature Range: 10 to 50ºC
Transducer Pressure Range: 1000 Torr
Transducer Over Pressure Limit: 2000 Torr
Differential Pressure: 45 psid max
Leak Integrity (external): 1 x 10⁻¹⁰ atm. cc/sec He
Electrical
Electical Connection: 5-pin M12 Connector
Digital Communications: DeviceNet (model specific)
Diagnostic/Service Port: RS485 via 2.5 mm jack
Power Supply/Consumption: DeviceNet: 545mA max. @ +11-25 Vdc,250 mA max. @ 24 Vdc
