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Maximum load [mN]: 50 / 100(1)
Load resolution [nN]: 3
Load noise floor [rms] [μN]: ≤0.05
Loading rate [mN/min]: Up to 1,000
Depth range [μm]: 50 / 100(1)
Depth resolution [nm]: 0.003
Depth noise floor [rms] [nm]: ≤0.03
Data acquisition rate [kHz]: 192
Options
Heating stage up to 200 °C: ✔
Liquid testing: ✔
(1) optional
Vacuum environment for better control of the heating and protection for indenter and sample against oxidation
Fully automatic procedure for minimizing thermal drift
Variable temperature testing from -150 °C to 800 °C
Vacuum levels down to 10-7 mbar
